AACVD synthesis of bilayer thin-film ZnO/Cr₂O₃ nanocomposites for chemoresistive gas sensors

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Using aerosol-assisted vapor deposition (AACVD), bilayer ZnO/Cr₂O₃ thin-film nanocomposites were prepared and validated using various physicochemical analysis techniques. The thermal behavior of precursors: zinc and chromium acetylacetonates was studied using TGA/DSC. The chemical composition of the obtained coatings was confirmed by EDX method, and the physical composition was confirmed by X-ray diffraction and Raman spectroscopy. The microstructural features were studied by SEM method. It was found that by varying the precursor concentration it is possible to change the morphology of the obtained coatings from an island structure to a continuous film. It is shown that ZnO/Cr₂O₃ bilayer films demonstrate a noticeable chemoresistive response in acetone detection.

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作者简介

A. Mokrushin

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

编辑信件的主要联系方式.
Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119991

S. Dmitrieva

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences; Mendeleev Russian University of Chemical Technology

Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119991; Moscow, 125047

Y. Gorban

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences; Mendeleev Russian University of Chemical Technology

Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119991; Moscow, 125047

A. Stroikova

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences; Mendeleev Russian University of Chemical Technology

Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119991; Moscow, 125047

N. Simonenko

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119991

A. Averin

Frumkin Institute of Physical Chemistry and Electrochemistry of the Russian Academy of Sciences

Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119071

E. Simonenko

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

Email: artyom.nano@gmail.com
俄罗斯联邦, Moscow, 119991

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2. Fig. 1. Thermal analysis data. DSC/TGA thermograms of zinc acetylacetonate in air flow at 20–1000°C (a); argon at 20–500°C (b); chromium acetylacetonate in air flow at 20–1000°C (c); argon at 20–500°C (d).

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3. Fig. 2. X-ray diffraction patterns of ZnO/Cr₂O₃ nanocomposite films on glass substrates.

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4. Fig. 3. Raman spectra of films on substrates made of Al₂O₃ nanocomposites ZnO/Cr₂O₃ (a) and individual Cr₂O₃ (b).

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5. Fig. 4. SEM micrographs of films on Al₂O₃ substrates of ZnO/Cr₂O₃ nanocomposites (a–c) and individual Cr₂O₃ (d–f).

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6. Fig. 5. Selectivity diagrams of ZnO/Cr₂O₃ nanocomposite films at 150–250°C to various gases (10 ppm NH₃, C₆H₆, C₃H₆O, C₂H₅OH, NO₂ and 1000 ppm H₂, CH₄): a – Z1Cr, b – Z2Cr, c – Z5Cr.

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7. Fig. 6. Responses to 4–100 ppm of acetone (a); dependence of the response value on the acetone concentration (b); signal reproducibility when detecting 20 ppm of ZnO/Cr₂O₃ nanocomposite films at 200°C (c).

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