Enviar artigo por via de e-mail Diagnostics of a high-current non-sputtering magnetron discharge in hydrogen
- Autores: Kaziev A.V.1,2, Kolodko D.V.3, Sazonov N.S.1, Kharkov M.M.1, Tumarkin A.V.1
-
Afiliações:
- National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
- Lebedev Physical Institute of RAS
- aNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 31 Kashirskoe sh., Moscow, 115409 Russian Federation bLebedev Physical Institute of RAS, 53 Leninskiy prosp., Moscow, 119991 Russian Federation сKotelnikov Institute of Radioengineering and Electronics of RAS, Fryazino Branch, 1 Vvedenskogo pl., Fryazino, Moscow Region, 141190 Russian Federation
- Edição: Volume 69, Nº 11 (2024)
- Páginas: 1095-1098
- Seção: Articles
- URL: https://cijournal.ru/0033-8494/article/view/684287
- DOI: https://doi.org/10.31857/S0033849424110078
- EDN: https://elibrary.ru/HOFBOQ
- ID: 684287
Citar
Acesso aberto
Acesso está concedido
Somente assinantes
Resumo
The experiments were carried out to characterize plasma of a non-sputtering millisecond discharge in hydrogen at a pressure of ~ 1 Torr, pulse duration and a maximum impulse power near 1 ms and 80 kW, correspondingly. It has been demonstrated that the implementation of impulse non-sputtering modes of a magnetron discharge in light gases enables generation of dense non-constricted plasma with no lines of cathode or anode material present in its optical emission spectra.
Palavras-chave
Sobre autores
A. Kaziev
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute); Lebedev Physical Institute of RAS
Autor responsável pela correspondência
Email: kaziev@plasma.mephi.ru
Rússia, 31 Kashirskoe sh., Moscow, 115409; 53 Leninskiy prosp., Moscow, 119991
D. Kolodko
aNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute),31 Kashirskoe sh., Moscow, 115409 Russian Federation
bLebedev Physical Institute of RAS, 53 Leninskiy prosp., Moscow, 119991 Russian Federation
сKotelnikov Institute of Radioengineering and Electronics of RAS, Fryazino Branch,
1 Vvedenskogo pl., Fryazino, Moscow Region, 141190 Russian Federation
Email: kaziev@plasma.mephi.ru
Rússia, Каширское шоссе, 31, Москва, 115409; Ленинский просп., 53, Москва, 119991; пл. Введенского, 1, Фрязино, Московская обл., 141190
N. Sazonov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: kaziev@plasma.mephi.ru
Rússia, 31 Kashirskoe sh., Moscow, 115409
M. Kharkov
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: kaziev@plasma.mephi.ru
Rússia, 31 Kashirskoe sh., Moscow, 115409
A. Tumarkin
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Email: kaziev@plasma.mephi.ru
Rússia, 31 Kashirskoe sh., Moscow, 115409
Bibliografia
- Мозгрин Д. В., Ходаченко Г. В., Фетисов И. К.// Физика плазмы. 1995. Т. 21. № 5. P. 422.
- Gudmundsson J. T., Brenning N., Lundin D., Helmersson U. // J. Vac. Sci. Technol. A. 2012. V. 30. № 3. P. 030801.
- Ходаченко Г. В., Мозгрин Д. В., Фетисов И. К., Степанова Т. В.// Физика плазмы. 2012. Т. 38. № 1. С. 71.
- Kaziev A. V. // Vacuum. 2018. V. 158. P. 191.
- Sommerer T. J., Aceto S. C., Trotter J. F. et al. // J. Phys. D: Appl. Phys. 2019. V. 52. № 43. P. 435202.
- Smith D. J., Sommerer T. J., Lawler J. E., Hitchon W. N. G. // J. Phys. D: Appl. Phys. 2021. V. 54. № 29. P. 295201.
- Levko D., Raja L. L. // J. Appl. Phys. 2022. V. 132. № 24. P. 243301.
Arquivos suplementares
